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Characterization of atomic layer deposited WNxCy thin film as a diffusion barrier for copper metallization File

Kim, Soo-Hyun , Oh, SS , Kim, HM , Kang, DH , Kim, KB , Li, WM , Haukka, S , Tuominen, M

Article Issue Date2004-03 View7
Comparison of the agglomeration behavior of Au and Cu films sputter deposited on silicon dioxide File

Kwon, JY , Yoon, Tae-Sik , Kim, KB , Min, SH

Article Issue Date2003-03 View10
Failure mechanism of a multilayer (TiN/Al/TiN) diffusion barrier between copper and silicon File

Kim, Soo-Hyun , Nam, KT , Datta, A , Kim, KB

Article Issue Date2002-11 View11
Ge-rich Si1-xGex nanocrystal formation by the oxidation of an as-deposited thin amorphous Si0.7Ge0.3 layer File

Yoon, Tae-Sik , Kim, KB

Article Issue Date2002-03 View5
Growth behavior and microstructure of Ge self-assembled islands on nanometer-scale patterned Si substrate File

Yoon, Tae-Sik , Zhao, ZM , Feng, W , Li, BY , Liu, J , Xie, YH , Ryu, DY , Russell, TP , Kim, HM , Kim, KB

Article Issue Date2006-05 View7
High spatial density nanocrystal formation using thin layer of amorphous Si0.7Ge0.3 deposited on SiO2 File

Yoon, Tae-Sik , Kwon, JY , Lee, DH , Kim, KB , Min, SH , Chae, DH , Kim, DH , Lee, JD , Park, BG , Lee, HJ

Article Issue Date2000-03 View10
Initial stage of amorphous si and Si0.7Ge0.3 deposition on SiO2 by low-pressure chemical vapor deposition File

Yoon, Tae-Sik , Lee, DH , Kim, KB , Min, SH

Article Issue Date2002-06 View8
Monolayer formation of colloidal nanoparticles on various substrates by single and multiple dip-coating process File

Yoon, Tae-Sik , Oh, J , Park, SH , Kim, V , Kwon, C , Kim, KB

Article Issue Date2005-01 View4
Nanocrystal memory cell using high-density Si0.73Ge0.27 quantum dot array

Chae, DH , Kim, DH , Lee, Y , Kwak, CH , Lee, JD , Park, BG , Yoon, Tae-Sik , Kwon, JY , Kim, KB , Kim, KR , et al

Article Issue Date1999-12 View7
Optimization of Al interlayer thickness for the multilayer diffusion barrier scheme in Cu metallization File

Datta, A , Nam, KT , Kim, Soo-Hyun , Kim, KB

Article Issue Date2002-07 View9
Single and multiple-step dip-coating of colloidal maghemite (gamma-Fe2O3) nanoparticles onto Si, Si3N4, and SiO2 substrates File

Yoon, Tae-Sik , Oh, JH , Park, SH , Kim, V , Jung, BG , Min, SH , Park, Jongnam , Hyeon, T , Kim, KB

Article Issue Date2004-11 View4
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